Standard specifications
Up to 5120*3560 pixel image
Beam resolution 5nm (SE)
High magnification: X 150K
4 variable apertures and continuous variable spot size
High Vac and Low Vac modes
SE and BSE detector
Dual mode
1 to 30 kV (6 steps 5kV)
Automatic adjustments
Stage navigator 5 axis
Optional features
Automatic particle analysis & Filter inspection
3D reconstruction software (Mountains Map)
Cooling/heating stage compatible
EDS & EBSD compatible
In-Situ experiments